JPS6157875U - - Google Patents

Info

Publication number
JPS6157875U
JPS6157875U JP14247984U JP14247984U JPS6157875U JP S6157875 U JPS6157875 U JP S6157875U JP 14247984 U JP14247984 U JP 14247984U JP 14247984 U JP14247984 U JP 14247984U JP S6157875 U JPS6157875 U JP S6157875U
Authority
JP
Japan
Prior art keywords
airtight chamber
air
partition wall
ventilation path
ventilation passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14247984U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0127106Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984142479U priority Critical patent/JPH0127106Y2/ja
Publication of JPS6157875U publication Critical patent/JPS6157875U/ja
Application granted granted Critical
Publication of JPH0127106Y2 publication Critical patent/JPH0127106Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
JP1984142479U 1984-09-20 1984-09-20 Expired JPH0127106Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984142479U JPH0127106Y2 (en]) 1984-09-20 1984-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984142479U JPH0127106Y2 (en]) 1984-09-20 1984-09-20

Publications (2)

Publication Number Publication Date
JPS6157875U true JPS6157875U (en]) 1986-04-18
JPH0127106Y2 JPH0127106Y2 (en]) 1989-08-14

Family

ID=30700802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984142479U Expired JPH0127106Y2 (en]) 1984-09-20 1984-09-20

Country Status (1)

Country Link
JP (1) JPH0127106Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0310272U (en]) * 1989-06-16 1991-01-31

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928347A (ja) * 1982-08-09 1984-02-15 Nec Corp 半導体装置のスクリ−ニング装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928347A (ja) * 1982-08-09 1984-02-15 Nec Corp 半導体装置のスクリ−ニング装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0310272U (en]) * 1989-06-16 1991-01-31

Also Published As

Publication number Publication date
JPH0127106Y2 (en]) 1989-08-14

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